data mining and visualisation

  • fast and flexible processing, validation and visualization of large historical data sets
  • context-dependent visualization of tool and metrology data, product parameters and yield
  • enhanced exploratory and statistical data analysis for supervision, fault detection and virtual metrology
  • high dimensional sensor data analysis (OES, NIR, Fluorescence) with multivariate methods
    (multiway-PCA, EFA, EWFA) and FFT
  • data processing, signal analysis and modelling for APC (advanced process control) and
    SPC (statistical process control)
  • linear and nonlinear modelling, prediction and fault detection
  • design of experiments (DoE)